Result Details
Carbon Nanotube Emitters in Sensoric Application
Vrba Radimír, prof. Ing., CSc., CEITEC (CEITEC), RG-2-02 (CEITEC), UMEL (FEEC)
Magát Martin, Ing., Ph.D., UMEL (FEEC)
Pekárková Jana, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Prášek Jan, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Hubálek Jaromír, prof. Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Jašek Ondřej, Mgr., Ph.D.
Zajíčková Lenka, doc. Mgr., Ph.D.
A contemporary approach to study the emission properties of carbon nanotubes (CNTs) in low distances between two electrodes is described in this paper. The method could be used in modern MEMS pressure sensor applications. The field emission works on the principle that the field emission current is correlated with the electrical field intensity, i.e., the anode-emitter distance when the applied voltage is fixed. This means that the CNTs array serves as the emitter source of electrons between the cathode and the anode in the electric field. The measurement of emission current density flowing through the electrodes is carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber is equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). For this experiment, CNTs are deposited using a thermal chemical vapour deposition.
carbon nanotubes; emission properies; thermal chemical vapour deposition; microwave torch deposition
@proceedings{BUT102638,
editor="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Jana {Pekárková} and Jan {Prášek} and Jaromír {Hubálek} and Ondřej {Jašek} and Lenka {Zajíčková}",
title="Carbon Nanotube Emitters in Sensoric Application",
year="2013",
series="1",
pages="67--70",
publisher="IARIA",
address="Barcelona",
isbn="978-1-61208-303-2"
}