Result Details

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

PEKÁREK, J.; VRBA, R.; PRÁŠEK, J.; JAŠEK, O.; MAJZLÍKOVÁ, P.; PEKÁRKOVÁ, J.; ZAJÍČKOVÁ, L. MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study. IEEE SENSORS JOURNAL, 2015, vol. 15, no. 3, p. 1430-1436. ISSN: 1530-437X.
Type
journal article
Language
English
Authors
Pekárek Jan, doc. Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., CEITEC (CEITEC), RG-2-02 (CEITEC), UMEL (FEEC)
Prášek Jan, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Jašek Ondřej, Mgr., Ph.D.
Majzlíková Petra, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Pekárková Jana, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Zajíčková Lenka, doc. Mgr., Ph.D.
Abstract

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.

Keywords

carbon nanotubes, field emitter arrays, microelectromechanical systems, microwave torch

URL
Published
2015
Pages
1430–1436
Journal
IEEE SENSORS JOURNAL, vol. 15, no. 3, ISSN 1530-437X
Publisher
IEEE Sensors Council
Place
445 Hoes Lane, Piscataway, NJ 08855-4141 USA
DOI
10.1109/JSEN.2014.2363213
UT WoS
000346743600016
EID Scopus
2-s2.0-84960085457
BibTeX 
@article{BUT110024,
  author="Jan {Pekárek} and Radimír {Vrba} and Jan {Prášek} and Ondřej {Jašek} and Petra {Majzlíková} and Jana {Pekárková} and Lenka {Zajíčková}",
  title="MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study",
  journal="IEEE SENSORS JOURNAL",
  year="2015",
  volume="15",
  number="3",
  pages="1430--1436",
  doi="10.1109/JSEN.2014.2363213",
  issn="1530-437X",
  url="http://dx.doi.org/10.1109/JSEN.2014.2363213"
}
Departments
Smart Nanodevices (RG-1-02)
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