Result Details

Improving of industrial process of monocrystalline tungsten wire

KADLEC, J., VRBA, R. Improving of industrial process of monocrystalline tungsten wire. In Socrates Workshop 2004. Intensive Training Programme in Electronic System Design. Proceedings. Greece: Technological Institute of Crete, Greece, 2004. 5 p. ISBN: 80-214-2818-X.
Type
conference paper
Language
English
Authors
Kadlec Jaroslav, doc. Ing., Ph.D., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
Abstract

This paper covers improving of industrial process of monocrystalline tungsten wire. For this industrial process was created new device for analyzing and controlling of optimal monocrystalline tungsten wire etching process. Main function of this new device is to drive position system, measure etching current and temperature and monocrystalline tungsten wire etching process.

Published
2004
Pages
5
Proceedings
Socrates Workshop 2004. Intensive Training Programme in Electronic System Design. Proceedings.
Conference
18th International Microworkshop 2004
ISBN
80-214-2818-X
Publisher
Technological Institute of Crete, Greece
Place
Greece
BibTeX 
@inproceedings{BUT11694,
  author="Jaroslav {Kadlec} and Radimír {Vrba}",
  title="Improving of industrial process of monocrystalline tungsten wire",
  booktitle="Socrates Workshop 2004. Intensive Training Programme in Electronic System Design. Proceedings.",
  year="2004",
  pages="5",
  publisher="Technological Institute of Crete, Greece",
  address="Greece",
  isbn="80-214-2818-X"
}
Departments
Department of Microelectronics (UMEL)
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