Result Details
Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes
Eliáš Marek, Mgr., Ph.D.
Zajíčková Lenka, Mgr., Ph.D.
Jašek Ondřej, Mgr., Ph.D.
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
In this paper the development and fabrication of the pressure sensor based on electron field emission from carbon nanotubes (CNTs) was described. The sensor consisted of two parts: a silicon membrane as an anode; and multi-walled CNTs on a silicon cathode, creating a vacuum micro-chamber. Both electrodes were fabricated from the silicon single crystal (Si) wafer of an orientation <100> doped by phosphorus. The CNTs were grown by a plasma enhanced CVD using an iron catalyst in an atmospheric pressure microwave torch. The catalyst was patterned into an area corresponding to the membrane dimensions. The thin CNTs with a diameter of about 80 nm were standing vertically perpendicular to the substrate due to a crowding effect. In order to find the threshold current, the emission characteristics of prepared sensors were measured.
CNTs, Field Emission, Pressure Sensor
@inproceedings{BUT23966,
author="Richard {Ficek} and Marek {Eliáš} and Lenka {Zajíčková} and Ondřej {Jašek} and Radimír {Vrba}",
title="Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes",
booktitle="MRS Proceedings Volume 1018E",
year="2007",
pages="4",
publisher="Material Research Society",
address="San Francisco"
}