Result Details

Micro-Electro-Mechanical Systems (MEMS)

FICEK, R.; VRBA, R. Micro-Electro-Mechanical Systems (MEMS). In Moderní metody řešení, návrhu a aplikace elektronických obvodů. Brno: Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105, 2007. p. 48-51. ISBN: 978-80-214-3535-3.
Type
conference paper
Language
English
Authors
Ficek Richard, Ing., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., UAMT (FEEC), UMEL (FEEC)
Abstract

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the
electron source in emission sensor or as the surface increase element in capacitance
sensor are presented. Both sensors are made of the two parts; elastic electrodesensing
film fabricated by anisotropic etching and solid electrode. The emission
sensor has elastic anode electrode with membrane and carbon nanotubes
(MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same
topology extensive by CNT on both electrodes. The MWCNTs were grown by
plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

Keywords

carbon nanotubes, emission, pressure sensor

Published
2007
Pages
48–51
Proceedings
Moderní metody řešení, návrhu a aplikace elektronických obvodů
Edition
první
ISBN
978-80-214-3535-3
Publisher
Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105
Place
Brno
BibTeX 
@inproceedings{BUT28141,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Micro-Electro-Mechanical Systems (MEMS)",
  booktitle="Moderní metody řešení, návrhu a aplikace elektronických obvodů",
  year="2007",
  number="první",
  pages="48--51",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="978-80-214-3535-3"
}
Departments
Department of Microelectronics (UMEL)
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