Result Details

Methods of measurement of capacitive pressure sensors

BEČVÁŘ, D., HUBÁLEK, J., VRBA, R., MUSIL, V. Methods of measurement of capacitive pressure sensors. In Electronic devices and systems 01 - Proceedings. Brno: Ing. Zdeněk Novotný, CSc., 2001. 6 p. ISBN: 80-214-1960-1.
Type
conference paper
Language
English
Authors
Bečvář Daniel, Ing., Ph.D., UMEL (FEEC)
Hubálek Jaromír, prof. Ing., Ph.D., FEEC (FEEC)
Vrba Radimír, prof. Ing., CSc.
Musil Vladislav, prof. Ing., CSc.
Abstract

Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.

Published
2001
Pages
6
Proceedings
Electronic devices and systems 01 - Proceedings
Edition
1
Conference
8th Electronic Devices and Systems Conference 2001
ISBN
80-214-1960-1
Publisher
Ing. Zdeněk Novotný, CSc.
Place
Brno
BibTeX 
@inproceedings{BUT2847,
  author="Daniel {Bečvář} and Jaromír {Hubálek} and Radimír {Vrba} and Vladislav {Musil}",
  title="Methods of measurement of capacitive pressure sensors",
  booktitle="Electronic devices and systems 01 - Proceedings",
  year="2001",
  number="1",
  pages="6",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-1960-1"
}
Departments
Department of Microelectronics (UMEL)
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