Result Details

The integrated unit for MEMS based pressure measurement

HÁZE, J.; VRBA, R.; PAVLÍK, M. The integrated unit for MEMS based pressure measurement. In Proceedings of ICONS 2009 Fourth International Conference on Systems. France: IEEE, 2009. p. 100-103. ISBN: 978-1-4244-3469-5.
Type
conference paper
Language
English
Authors
Háze Jiří, doc. Ing., Ph.D., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
Pavlík Michal, Ing., Ph.D., UMEL (FEEC)
Abstract

The article deals with a custom based integrated measurement unit (IMU), which serves as processing device for MEMS based pressure measurement. The IMU consists of the three elementar stages, measurement stage, processing stage and communication stage. They are implemented on the one single board. The measurement block has 16-bit resolution with 64 provided measurement ranges to sutisfy appropriate accuracy. The power supply is 5 V, which allows to measure current with 238 nA step within 1 mA measurement range. The communication stage is based upon I2C standard.

Keywords

integrated unit, MEMS, sensor

Published
2009
Pages
100–103
Proceedings
Proceedings of ICONS 2009 Fourth International Conference on Systems
Conference
4th International Conference on Systems (ICONS 2009)
ISBN
978-1-4244-3469-5
Publisher
IEEE
Place
France
BibTeX 
@inproceedings{BUT29225,
  author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}",
  title="The integrated unit for MEMS based pressure measurement",
  booktitle="Proceedings of ICONS 2009 Fourth International Conference on Systems",
  year="2009",
  pages="100--103",
  publisher="IEEE",
  address="France",
  isbn="978-1-4244-3469-5"
}
Departments
Department of Microelectronics (UMEL)
Back to top