Result Details
A novel hybrid integrated system for capacitive pressure MEMS sensors
Vrba Radimír, prof. Ing., CSc., RE-KancQ (RO), UMEL (FEEC)
Pavlík Michal, Ing., Ph.D., UMEL (FEEC)
The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system
should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is
auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with
technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller,
communication and data bus.
The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is
the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter
with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the
mentioned AD 7745 converter, but with less complexity of the whole circuitries.
MEMS sensor, data acquisition system
@article{BUT48726,
author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}",
title="A novel hybrid integrated system for capacitive pressure MEMS sensors",
journal="ElectroScope - http://www.electroscope.zcu.cz",
year="2009",
volume="2009",
number="3",
pages="41--44",
issn="1802-4564",
url="https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf"
}