Result Details

Perspective carbon materials as electron emitters

PEKÁREK, J.; VRBA, R.; MAGÁT, M.; CHOMOUCKÁ, J.; MAJZLÍKOVÁ, P.; DRBOHLAVOVÁ, J.; HRDÝ, R.; PRÁŠEK, J.; MÁRIK, M.; SVATOŠ, V.; HUBÁLEK, J.; JAŠEK, O.; ZAJÍČKOVÁ, L. Perspective carbon materials as electron emitters. In Conference Proceedings 5th International Conference NANOCON 2013. 1. Ostrava: Tanger, Ltd., 2013. p. 108-112. ISBN: 978-80-87294-47-5.
Type
conference paper
Language
English
Authors
Pekárek Jan, doc. Ing., Ph.D., MEL-SIX (FEEC), RG-1-02 (CEITEC), UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., CEITEC (CEITEC), RG-2-02 (CEITEC), UMEL (FEEC)
Magát Martin, Ing., Ph.D., UMEL (FEEC)
Pekárková Jana, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Majzlíková Petra, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC), ÚFSCH (FCH)
Drbohlavová Jana, doc. Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Hrdý Radim, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Prášek Jan, Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Márik Marian, Ing., Ph.D., CEITEC (CEITEC), RG-1-02 (CEITEC), UMEL (FEEC)
Svatoš Vojtěch, Ing., FEEC (FEEC), RG-1-02 (CEITEC), UMEL (FEEC)
Hubálek Jaromír, prof. Ing., Ph.D., RG-1-02 (CEITEC), UMEL (FEEC)
Jašek Ondřej, Mgr., Ph.D.
Zajíčková Lenka, doc. Mgr., Ph.D.
Abstract

Carbon materials are good candidates as electron emitters. In this article will be described emission properties of carbon nanotubes prepared by chemical vapour deposition (CVD). The measurement of emission current density flowing through the electrodes will be carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber will be equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). The measured results will be compared with Fowler-Nordheim theory. One of the proposed solutions for usage CNTs as emitters is in a pressure sensor. A method for packaging emission pressure sensor will be also invented so the emission could exist outside the laboratory vacuum chamber. The electrodes of the sensor could be bonded using glass frit bonding or anodic bonding technology.

Keywords

Carbon nanotubes; emission properties; thermal chemical vapour deposition; anodic bonding

Published
2013
Pages
108–112
Proceedings
Conference Proceedings 5th International Conference NANOCON 2013
Series
1
Edition
1
Conference
5th International Conference NANOCON 2013
ISBN
978-80-87294-47-5
Publisher
Tanger, Ltd.
Place
Ostrava
UT WoS
000352070900017
BibTeX 
@inproceedings{BUT102636,
  author="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Jana {Pekárková} and Petra {Majzlíková} and Jana {Drbohlavová} and Radim {Hrdý} and Jan {Prášek} and Marian {Márik} and Vojtěch {Svatoš} and Jaromír {Hubálek} and Ondřej {Jašek} and Lenka {Zajíčková}",
  title="Perspective carbon materials as electron emitters",
  booktitle="Conference Proceedings 5th International Conference NANOCON 2013",
  year="2013",
  series="1",
  number="1",
  pages="108--112",
  publisher="Tanger, Ltd.",
  address="Ostrava",
  isbn="978-80-87294-47-5"
}
Departments
Central European Institute of Technology BUT (CEITEC)
Department of Microelectronics (UMEL)
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