Detail výsledku

Perspective carbon materials as electron emitters

PEKÁREK, J.; VRBA, R.; MAGÁT, M.; CHOMOUCKÁ, J.; MAJZLÍKOVÁ, P.; DRBOHLAVOVÁ, J.; HRDÝ, R.; PRÁŠEK, J.; MÁRIK, M.; SVATOŠ, V.; HUBÁLEK, J.; JAŠEK, O.; ZAJÍČKOVÁ, L. Perspective carbon materials as electron emitters. In Conference Proceedings 5th International Conference NANOCON 2013. 1. Ostrava: Tanger, Ltd., 2013. p. 108-112. ISBN: 978-80-87294-47-5.
Typ
článek ve sborníku konference
Jazyk
anglicky
Autoři
Pekárek Jan, doc. Ing., Ph.D., MEL-SIX (FEKT), RG-1-02 (CEITEC VUT), UMEL (FEKT)
Vrba Radimír, prof. Ing., CSc., CEITEC VUT (CEITEC VUT), RG-2-02 (CEITEC VUT), UMEL (FEKT)
Magát Martin, Ing., Ph.D., UMEL (FEKT)
Pekárková Jana, Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT)
Majzlíková Petra, Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT), ÚFSCH (FCH)
Drbohlavová Jana, doc. Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT)
Hrdý Radim, Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT)
Prášek Jan, Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT)
Márik Marian, Ing., Ph.D., CEITEC VUT (CEITEC VUT), RG-1-02 (CEITEC VUT), UMEL (FEKT)
Svatoš Vojtěch, Ing., FEKT (FEKT), RG-1-02 (CEITEC VUT), UMEL (FEKT)
Hubálek Jaromír, prof. Ing., Ph.D., RG-1-02 (CEITEC VUT), UMEL (FEKT)
Jašek Ondřej, Mgr., Ph.D.
Zajíčková Lenka, doc. Mgr., Ph.D.
Abstrakt

Carbon materials are good candidates as electron emitters. In this article will be described emission properties of carbon nanotubes prepared by chemical vapour deposition (CVD). The measurement of emission current density flowing through the electrodes will be carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber will be equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). The measured results will be compared with Fowler-Nordheim theory. One of the proposed solutions for usage CNTs as emitters is in a pressure sensor. A method for packaging emission pressure sensor will be also invented so the emission could exist outside the laboratory vacuum chamber. The electrodes of the sensor could be bonded using glass frit bonding or anodic bonding technology.

Klíčová slova

Carbon nanotubes; emission properties; thermal chemical vapour deposition; anodic bonding

Rok
2013
Strany
108–112
Sborník
Conference Proceedings 5th International Conference NANOCON 2013
Řada
1
Vydání
1
Konference
5th International Conference NANOCON 2013
ISBN
978-80-87294-47-5
Vydavatel
Tanger, Ltd.
Místo
Ostrava
UT WoS
000352070900017
BibTeX 
@inproceedings{BUT102636,
  author="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Jana {Pekárková} and Petra {Majzlíková} and Jana {Drbohlavová} and Radim {Hrdý} and Jan {Prášek} and Marian {Márik} and Vojtěch {Svatoš} and Jaromír {Hubálek} and Ondřej {Jašek} and Lenka {Zajíčková}",
  title="Perspective carbon materials as electron emitters",
  booktitle="Conference Proceedings 5th International Conference NANOCON 2013",
  year="2013",
  series="1",
  number="1",
  pages="108--112",
  publisher="Tanger, Ltd.",
  address="Ostrava",
  isbn="978-80-87294-47-5"
}
Pracoviště
Středoevropský technologický institut VUT (CEITEC VUT)
Ústav mikroelektroniky (UMEL)
Nahoru