Result Details

Experimental study of MEMS capacitive sensor

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M. Experimental study of MEMS capacitive sensor. In EDS'09 IMAPS CS International Conference Proceedings. Brno: Vysoké učení technické v Brně, Antonínská 548/1, 2009. p. 205-209. ISBN: 978-80-214-3933-7.
Type
conference paper
Language
English
Authors
Pekárek Jan, doc. Ing., Ph.D., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., RE-KancQ (RO), UMEL (FEEC)
Ficek Richard, Ing., UMEL (FEEC)
Magát Martin, Ing., Ph.D., UMEL (FEEC)
Abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

Keywords

Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition

Published
2009
Pages
205–209
Proceedings
EDS'09 IMAPS CS International Conference Proceedings
Edition
1
Conference
Electronic Devices and Systems EDS'09 IMAPS CS International Conference 2009
ISBN
978-80-214-3933-7
Publisher
Vysoké učení technické v Brně, Antonínská 548/1
Place
Brno
BibTeX 
@inproceedings{BUT31908,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Experimental study of MEMS capacitive sensor",
  booktitle="EDS'09 IMAPS CS International Conference Proceedings",
  year="2009",
  number="1",
  pages="205--209",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="978-80-214-3933-7"
}
Departments
Department of Microelectronics (UMEL)
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