Result Details

Means of Pressure Analysis using Nitride Silicon Diaphragm

MATĚJKA, F., MATĚJKOVÁ, J., VRBA, R., BENEŠ, P. Means of Pressure Analysis using Nitride Silicon Diaphragm. In Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001. Brazil: WSES Press, 2001. 4 p. ISBN: 960-8052-39-4.
Type
conference paper
Language
English
Authors
Matějka František, Mgr.
Matějková Jiřina
Vrba Radimír, prof. Ing., CSc.
Beneš Petr, doc. Ing., Ph.D.
Abstract

Means of Pressure Analysis using Nitride Silicon Diaphragm

Keywords

Pressure Analysis Nitride Silicon Diaphragm

Published
2001
Pages
4
Proceedings
Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001
Edition
1
Conference
TEMI 2001 11th IMEKO TC-4 Symposium on Trends in Electrical Measurement and Instrumentation
ISBN
960-8052-39-4
Publisher
WSES Press
Place
Brazil
BibTeX 
@inproceedings{BUT3991,
  author="František {Matějka} and Jiřina {Matějková} and Radimír {Vrba} and Petr {Beneš}",
  title="Means of Pressure Analysis using Nitride Silicon Diaphragm",
  booktitle="Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001",
  year="2001",
  number="1",
  pages="4",
  publisher="WSES Press",
  address="Brazil",
  isbn="960-8052-39-4"
}
Departments
Department of Microelectronics (UMEL)
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