Detail výsledku

Means of Pressure Analysis using Nitride Silicon Diaphragm

MATĚJKA, F., MATĚJKOVÁ, J., VRBA, R., BENEŠ, P. Means of Pressure Analysis using Nitride Silicon Diaphragm. In Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001. Brazil: WSES Press, 2001. 4 p. ISBN: 960-8052-39-4.
Typ
článek ve sborníku konference
Jazyk
anglicky
Autoři
Matějka František, Mgr.
Matějková Jiřina
Vrba Radimír, prof. Ing., CSc.
Beneš Petr, doc. Ing., Ph.D.
Abstrakt

Means of Pressure Analysis using Nitride Silicon Diaphragm

Klíčová slova

Pressure Analysis Nitride Silicon Diaphragm

Rok
2001
Strany
4
Sborník
Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001
Vydání
1
Konference
TEMI 2001 11th IMEKO TC-4 Symposium on Trends in Electrical Measurement and Instrumentation
ISBN
960-8052-39-4
Vydavatel
WSES Press
Místo
Brazil
BibTeX 
@inproceedings{BUT3991,
  author="František {Matějka} and Jiřina {Matějková} and Radimír {Vrba} and Petr {Beneš}",
  title="Means of Pressure Analysis using Nitride Silicon Diaphragm",
  booktitle="Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001",
  year="2001",
  number="1",
  pages="4",
  publisher="WSES Press",
  address="Brazil",
  isbn="960-8052-39-4"
}
Pracoviště
Ústav mikroelektroniky (UMEL)
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