Result Details
Optický senzor tlaku s MEMS snímací membránou
Created: 2008
English title
Optical pressure sensor with MEMS sensing membrane
Type
functioning sample
Language
Czech
Authors
Kadlec Jaroslav, doc. Ing., Ph.D., UMEL (FEEC)
Helán Radek, Ing., Ph.D., UMEL (FEEC)
Urban František, doc. Ing., CSc., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
Vlach Radek, doc. Ing., Ph.D., ISMMB DM (FME)
Helán Radek, Ing., Ph.D., UMEL (FEEC)
Urban František, doc. Ing., CSc., UMEL (FEEC)
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
Vlach Radek, doc. Ing., Ph.D., ISMMB DM (FME)
Description
Optický senzor tlaku s MEMS křemíkovou membránou a základnou z materiálu SIMAX.
English description
Optical pressure sensor with MEMS sensing membrane and header from SIMAX.
Keywords
Tlakový snímač, optický princip, MEMS membrána
English keywords
Pressure sensor, optical principle, MEMS membrane
Location
BD Sensors, s.r.o., Buchlovice
License
Use of the result by another entity is possible without acquiring a license (the result is not licensed)
License Fee
The licensor does not require a license fee for the result
Departments