Thesis Details

Photometric Stereo Processing for Microscopy

Bachelor's Thesis Student: Repka Samuel Academic Year: 2021/2022 Supervisor: Zemčík Pavel, prof. Dr. Ing.
Czech title
Fotometrické stereozpracování pro mikroskopy
Language
English
Abstract

This paper proposed a method of 3D reconstruction of scanning electron microscope (SEM) specimen. The aim is to explore the possibilities of topography reconstruction of microscopic samples, as well as to attempt to solve the task using tools already available on conventional scanning electron microscopes. The proposed solution uses images from a four-segment backscattered electrons detector as an input to the photometric stereo algorithm. This algorithm exploits the fact that the brightness of the image point is dependent on the inclination of the sample surface. Reflectance maps are used to estimate the inclination in each pixel, creating a map of normal vectors. The map is then used for topography reconstruction. A novel technique for reflectance map estimation is proposed. This method is applied to tin samples to remove the sample's atomic number effects. The fact that all data are acquired simultaneously allows for fast reconstruction. Usage of already available and widespread tools eliminates a need for specialized equipment such as Atomic Force Microscopes.

Keywords

Photometric stereo, Scanning electron microscopes, 4-segment BSE detector, 3D reconstruction

Department
Degree Programme
Files
Status
defended, grade A
Date
14 June 2022
Reviewer
Committee
Zemčík Pavel, prof. Dr. Ing. (DCGM FIT BUT), předseda
Burget Lukáš, doc. Ing., Ph.D. (DCGM FIT BUT), člen
Holík Lukáš, doc. Mgr., Ph.D. (DITS FIT BUT), člen
Martínek Tomáš, Ing., Ph.D. (DCSY FIT BUT), člen
Matoušek Petr, doc. Ing., Ph.D., M.A. (DIFS FIT BUT), člen
Citation
REPKA, Samuel. Photometric Stereo Processing for Microscopy. Brno, 2022. Bachelor's Thesis. Brno University of Technology, Faculty of Information Technology. 2022-06-14. Supervised by Zemčík Pavel. Available from: https://www.fit.vut.cz/study/thesis/25091/
BibTeX
@bachelorsthesis{FITBT25091,
    author = "Samuel Repka",
    type = "Bachelor's thesis",
    title = "Photometric Stereo Processing for Microscopy",
    school = "Brno University of Technology, Faculty of Information Technology",
    year = 2022,
    location = "Brno, CZ",
    language = "english",
    url = "https://www.fit.vut.cz/study/thesis/25091/"
}
Back to top