Result Details

Carbon Nanotubes Applicated in Pressure Measurement

FICEK, R.; VRBA, R. Carbon Nanotubes Applicated in Pressure Measurement. In Proceedings of the 13th Conference STUDENT EEICT 2007. Brno: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií, 2007. 4 p. ISBN: 978-80-214-3410-3.
Type
conference paper
Language
English
Authors
Ficek Richard, Ing., UMEL (FEEC), UREL (FEEC)
Vrba Radimír, prof. Ing., CSc., UMEL (FEEC)
Abstract

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as
the electron source in emission sensor or as the surface increase element in capacitance
sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet
anisotropic etching process and solid electrode. The emission sensor has elastic anode
electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in
the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on
both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced
chemical vapour deposition (PECVD).

Keywords

Carbon Nanotubes, Sensor, MEMS

Published
2007
Pages
4
Proceedings
Proceedings of the 13th Conference STUDENT EEICT 2007
Edition
první
Conference
Student EEICT 2007
ISBN
978-80-214-3410-3
Publisher
Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií
Place
Brno
BibTeX 
@inproceedings{BUT23640,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Carbon Nanotubes Applicated in Pressure Measurement",
  booktitle="Proceedings of the 13th Conference STUDENT EEICT 2007",
  year="2007",
  number="první",
  pages="4",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  address="Brno",
  isbn="978-80-214-3410-3"
}
Departments
Department of Microelectronics (UMEL)
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