Detail výsledku
Noise in piezoresistive pressure sensors
Šikula Josef, prof. Ing. RNDr., DrSc., UFYZ (FEKT)
Vrba Radimír, prof. Ing., CSc., CEITEC VUT (CEITEC VUT), RG-2-02 (CEITEC VUT), UMEL (FEKT)
Majzner Jiří, Ing., Ph.D., RG-1-07 (CEITEC VUT), UFYZ (FEKT)
Sedlák Petr, doc. Ing., Ph.D., RG-1-07 (CEITEC VUT), UFYZ (FEKT)
Santo-Zarnik Marina
Belavic Darko, dr.
In this paper we present the results of noise analysis in piezoresistive ceramic pressure sensors (CPSs) prepared by low temperature co-fired ceramics (LTCC) technology. For this study a piezoresistive CPSs in a full Wheatstone-bridge configuration were prepared. Low frequency noise measurements can be used for the quality evaluation of CPSs. The critical and non-critical defects could be determined from the noise measurements. Increased value of spectral density of sensor output voltage fluctuation gives the information about the cracks and structural defects in sensing resistor’s structure as well as about the crack in sensor’s diaphragm. We propose parallel/series configuration of resistors for measurement of particular sensing resistor influence on the total sensor noise. In this case the noise spectral density of single resistor in parallel to three resistors in series is 8 to 10times higher comparing to the noise spectral density of each of these three resistors in series. Then the sensing resistors with structural defects could be identified from the noise measurements.
1/f noise; piezoresistive preasure sensor; LTCC; quality testing; reliability
@inproceedings{BUT120157,
author="Vlasta {Sedláková} and Josef {Šikula} and Radimír {Vrba} and Jiří {Majzner} and Petr {Sedlák} and Marina {Santo-Zarnik} and Darko {Belavic}",
title="Noise in piezoresistive pressure sensors",
booktitle="Noise and Fluctuation (ICNF)",
year="2015",
pages="1--4",
publisher="IEEE",
doi="10.1109/ICNF.2015.7288591",
isbn="978-1-4673-8335-6",
url="https://ieeexplore.ieee.org/document/7288591"
}