Detail výsledku

Tips chip measuring unit

Pavlík M., Magát M., Vrba R. Tips chip measuring unit. In EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS. Brno: Vysoké učení technické v Brně, Antonínská 548/1, 2006. 4 p. ISBN: 80-214-3246-2.
Typ
článek ve sborníku konference
Jazyk
anglicky
Autoři
Pavlík Michal, Ing., Ph.D., UMEL (FEKT), UREL (FEKT)
Magát Martin, Ing., Ph.D., UMEL (FEKT)
Vrba Radimír, prof. Ing., CSc., UMEL (FEKT)
Abstrakt

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Klíčová slova

tip, chip, measurement

Rok
2006
Strany
4
Sborník
EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
Vydání
1
Konference
International Conference Electronic Devices and Systems IMAPS CS International Conference 2006
ISBN
80-214-3246-2
Vydavatel
Vysoké učení technické v Brně, Antonínská 548/1
Místo
Brno
BibTeX 
@inproceedings{BUT18812,
  author="Michal {Pavlík} and Martin {Magát} and Radimír {Vrba}",
  title="Tips chip measuring unit",
  booktitle="EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  year="2006",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="80-214-3246-2"
}
Pracoviště
Ústav mikroelektroniky (UMEL)
Nahoru