Detail výsledku

Carbon nanostructures used in capacitive sensors as the surface increase element

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M. Carbon nanostructures used in capacitive sensors as the surface increase element. In SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings. 1. Budapest: Budapest University of Technology and Economics, Budapest, Hungary, 2009. p. 323-326. ISBN: 978-1-4244-5132-6.
Typ
článek ve sborníku konference
Jazyk
anglicky
Autoři
Pekárek Jan, doc. Ing., Ph.D., UMEL (FEKT)
Vrba Radimír, prof. Ing., CSc., RE-KancQ (RE), UMEL (FEKT)
Ficek Richard, Ing., UMEL (FEKT)
Magát Martin, Ing., Ph.D., UMEL (FEKT)
Abstrakt

Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensors. The CNTs were grown by plasma enhanced chemical vapor deposition (PECVD) by using iron as a catalyst in an atmospheric pressure microwave torch. The capacitive sensor takes advantage of CNTs dimensions to increase the surface. This means that the CNTs arrays in the capacitive sensors increase the surface of the electrodes, which are similar to a plate capacitor.

Klíčová slova

Pressure sensor, carbon nanotubes, plasma enhanced chemical vapor deposition

Rok
2009
Strany
323–326
Sborník
SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings
Řada
1.
Konference
15th International Symposium for Design and Technology of Electronics Packages, SIITME 2009
ISBN
978-1-4244-5132-6
Vydavatel
Budapest University of Technology and Economics, Budapest, Hungary
Místo
Budapest
BibTeX 
@inproceedings{BUT33190,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Carbon nanostructures used in capacitive sensors as the surface increase element",
  booktitle="SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings",
  year="2009",
  series="1.",
  pages="323--326",
  publisher="Budapest University of Technology and Economics, Budapest, Hungary",
  address="Budapest",
  isbn="978-1-4244-5132-6"
}
Pracoviště
Ústav mikroelektroniky (UMEL)
Nahoru